For R&D and failure evaluation in nanofabrication.
Picture Credit score:Quantum Design
The Vista 300 from Molecular Vista is a nano IR instrument focused for superior semiconductor course of monitoring and defect evaluation.
Vista 300 combines an atomic drive microscope with infrared spectroscopy to offer Photograph-induced Power Microscopy (PiFM), a method that performs chemical mapping with a spatial decision of <5 nm, which is way superior to competing analytical strategies like TOF-SIMS or XPS. PiFM offers chemical maps of compounds and molecular supplies just like how EDX performs elemental mapping on the nanoscale. Whereas STEM-EDX has decision just like PiFM, it could actually solely see atomic species. PiFM, nevertheless, maps and identifies molecules, be they natural or polymeric contaminants, inorganic particles or nanostructures, or EUV resist movies and residues. PiFM is a noncontact method, so samples stay clear, making PiFM ideally suited for analysing floor functionalisation (even right down to monolayers) or figuring out nanoscale defects and particles.
A outstanding demonstration of PiFM is proven within the accompanying photos – PiFM is ready to map the chemical variations between uncovered and unexposed 16 nm half-pitch patterns in EUV resist earlier than the resist is developed. AFM topography reveals no trace of the uncovered sample, however PiFM detects the chemical adjustments brought on by EUV publicity.
Vista 300 is designed to deal with full 300 mm wafers however does so in a minimal footprint of only one.1 x 1.1 m2. The instrument is absolutely developed and prepared for speedy orders. Demonstrations of Vista 300 on buyer wafers or different pattern can be found by contacting Dr. Shayz Ikram beneath.
In 2015, MVI was the primary firm to reveal <10nm decision with nano IR (beating the competitors by 10X on the time) and continues to steer the business in the present day with the introduction of latest automation options that make PiFM simpler than ever. MVI’s new AutoPiFM functionality identifies supplies and generates chemical maps and chemical fingerprint spectra with minimal consumer enter required. Sit again and let AutoPiFM do the work! Likewise, MVI’s new AutoAlign system mechanically and optimally focuses the IR optical beam on the AFM tip, eliminating the necessity for the consumer to study the small print of optical alignment. These options make PiFM absolutely accessible to laboratory or manufacturing technicians.
With extra superior semiconductor processes depending on atomically skinny natural and dielectric layers with more and more smaller function sizes, Vista 300 is an ideal hybrid topography and chemical metrology instrument for characterising Excessive NA EUV lithography, selective atomic layer deposition, Cu-Cu hybrid bonding processes, and sub-100 nm defects.
Dr. Sung Park, CEO of Molecular Vista
