MXenes, the most important recognized household of 2D supplies, are recognized for his or her difficult construction consisting of many various components. Their properties might be finely tuned by exact engineering of the composition of every atomic layer. Thus it’s essential to additional develop the secondary ion mass spectrometry (SIMS) approach which might unambiguously determine every aspect with atomic precision. The newly established protocol of deconvolution and calibration of the SIMS information permits layer-by-layer characterization of MAX part and MXene samples with ±1% accuracy. Such precision is especially essential for samples that encompass a number of completely different transition metals of their construction. It confirms that the majority MXenes include a considerable quantity of oxygen within the X layers, thus enabling the identification of oxycarbides, oxynitrides, and oxycarbonitrides subfamilies of those supplies. It can be utilized for under- and over-etched samples and to find out the precise composition of termination layers. Typically, the SIMS approach could present invaluable help within the synthesis and optimization of the MAX part and MXene research.